@misc{indiciaecd9a3fc65506,
  title = {Signature of growth-deposition technique on the properties of PECVD and thermal SiO2},
  author = {Subimal Majee and Devesh Barshilia and Sanjeev Kumar and Prabhash Mishra and Jamil Akhtar},
  year = {2017},
  doi = {10.1063/1.5047699},
  url = {https://arxiv.org/abs/1709.03257},
  note = {Source identifier: 1709.03257}
}