@misc{indiciaef1d826d8fb46,
  title = {A fabrication guide for planar silicon quantum dot heterostructures},
  author = {Paul C. Spruijtenburg and Sergey V. Amitonov and Wilfred G. van der Wiel and Floris A. Zwanenburg},
  year = {2018},
  doi = {10.1088/1361-6528/aaabf5},
  url = {https://arxiv.org/abs/1709.08866},
  note = {Source identifier: 1709.08866}
}