TY - RPRT TI - Effects of pressure on suspended micromechanical membrane arrays AU - Andreas Naesby AU - Sepideh Naserbakht AU - Aurélien Dantan PY - 2017 DO - 10.1063/1.5004261 UR - https://arxiv.org/abs/1710.00043 ID - 1710.00043 ER -