@misc{indiciaea42064c407d5,
  title = {Argon Cluster-Ion Sputter Yield: Molecular Dynamics Simulations on Silicon and an Equation for Estimating Total Sputter Yield},
  author = {Peter J Cumpson and Mieszko Jaskiewicz and WooKyun Kim},
  year = {2017},
  url = {https://arxiv.org/abs/1710.00367},
  note = {Source identifier: 1710.00367}
}