TY  - RPRT
TI  - Argon Cluster-Ion Sputter Yield: Molecular Dynamics Simulations on Silicon and an Equation for Estimating Total Sputter Yield
AU  - Peter J Cumpson
AU  - Mieszko Jaskiewicz
AU  - WooKyun Kim
PY  - 2017
UR  - https://arxiv.org/abs/1710.00367
ID  - 1710.00367
ER  -