@misc{indiciaeb30551c71805,
  title = {Construction and evaluation of an ultrahigh-vacuum-compatible sputter deposition source},
  author = {Peter Lackner and Joong Il Jake Choi and Ulrike Diebold and Michael Schmid},
  year = {2017},
  doi = {10.1063/1.4998700},
  url = {https://arxiv.org/abs/1710.06377},
  note = {Source identifier: 1710.06377}
}