TY  - RPRT
TI  - Construction and evaluation of an ultrahigh-vacuum-compatible sputter deposition source
AU  - Peter Lackner
AU  - Joong Il Jake Choi
AU  - Ulrike Diebold
AU  - Michael Schmid
PY  - 2017
DO  - 10.1063/1.4998700
UR  - https://arxiv.org/abs/1710.06377
ID  - 1710.06377
ER  -