@misc{indiciaeba3711714641,
  title = {Ion Implantation for Deterministic Single Atom Devices},
  author = {J. L. Pacheco and M. Singh and D. L. Perry and J. R. Wendt and G. Ten Eyck and R. P. Manginell and T. Pluym and D. R. Luhman and M. P. Lilly and M. S. Carroll and E. Bielejec},
  year = {2017},
  doi = {10.1063/1.5001520},
  url = {https://arxiv.org/abs/1711.00792},
  note = {Source identifier: 1711.00792}
}