@misc{indiciae5245ebb70f99,
  title = {Thickness Dependent Parasitic Channel Formation at AlN/Si Interfaces},
  author = {Hareesh Chandrasekar and K N Bhat and Muralidharan Rangarajan and Srinivasan Raghavan and Navakanta Bhat},
  year = {2017},
  doi = {10.1038/s41598-017-16114-w},
  url = {https://arxiv.org/abs/1711.03324},
  note = {Source identifier: 1711.03324}
}