TY  - RPRT
TI  - Thickness Dependent Parasitic Channel Formation at AlN/Si Interfaces
AU  - Hareesh Chandrasekar
AU  - K N Bhat
AU  - Muralidharan Rangarajan
AU  - Srinivasan Raghavan
AU  - Navakanta Bhat
PY  - 2017
DO  - 10.1038/s41598-017-16114-w
UR  - https://arxiv.org/abs/1711.03324
ID  - 1711.03324
ER  -