@misc{indiciae5fa137e4b8f3, title = {Experimental studies of thorium ions implantation from pulse laser plasma into thin silicon oxide layers}, author = {P. V. Borisyuk and E. V. Chubunova and Yu. Yu. Lebedinskii and E. V. Tkalya and O. S. Vasilyev and V. P. Yakovlev and E. Strugovshchikov and D. Mamedov and A. Pishtshev and S. Zh. Karazhanov}, year = {2017}, doi = {10.1088/1612-202x/aaacf8}, url = {https://arxiv.org/abs/1711.03378}, note = {Source identifier: 1711.03378} }