@misc{indiciae31b78c62fc61,
  title = {Quantifying Atom-scale Dopant Movement and Electrical Activation in Si:P Monolayers},
  author = {Xiqiao Wang and Joseph A. Hagmann and Pradeep Namboodiri and Jonathan Wyrick and Kai Li and Roy E. Murray and Alline Myers and Frederick Misenkosen and M. D. Stewart, Jr. and Curt A. Richter and Richard M. Silver},
  year = {2017},
  url = {https://arxiv.org/abs/1711.03612},
  note = {Source identifier: 1711.03612}
}