@misc{indiciae81a6125a5d33,
  title = {Direct atomic fabrication and dopant positioning in Si using electron beams with active real time image-based feedback},
  author = {Stephen Jesse and Bethany M. Hudak and Eva Zarkadoula and Jiaming Song and Artem Maksov and Miguel Fuentes-Cabrera and Panchapakesan Ganesh and Ivan Kravchenko and Paul C. Snijders and Andrew R. Lupini and Albina Borisevich and Sergei V. Kalinin},
  year = {2017},
  doi = {10.1088/1361-6528/aabb79},
  url = {https://arxiv.org/abs/1711.05810},
  note = {Source identifier: 1711.05810}
}