TY - RPRT TI - On-chip radially and azimuthally polarized vortex beam generation utilizing shallow-etched gratings AU - Zengkai Shao AU - Jiangbo Zhu AU - Yanfeng Zhang AU - Yujie Chen AU - Siyuan Yu PY - 2017 UR - https://arxiv.org/abs/1711.07136 ID - 1711.07136 ER -