@misc{indiciae5b3a8c0c923b,
  title = {The Benefit of Wide Energy Range Spectrum Acquisition During Sputter Depth Profile Measurements},
  author = {Uwe Scheithauer},
  year = {2017},
  url = {https://arxiv.org/abs/1711.09458},
  note = {Source identifier: 1711.09458}
}