@misc{indiciaeb41d1a1b7c95,
  title = {Effect of RF Sputtering Process Parameters on Silicon Nitride Thin Film Deposition},
  author = {Sachin S Bharadwaj and GR Rajkumar and B W Shivaraj and M Krishna},
  year = {2017},
  url = {https://arxiv.org/abs/1711.09556},
  note = {Source identifier: 1711.09556}
}