TY  - RPRT
TI  - Effect of RF Sputtering Process Parameters on Silicon Nitride Thin Film Deposition
AU  - Sachin S Bharadwaj
AU  - GR Rajkumar
AU  - B W Shivaraj
AU  - M Krishna
PY  - 2017
UR  - https://arxiv.org/abs/1711.09556
ID  - 1711.09556
ER  -