@misc{indiciae0505aa82a557,
  title = {Correlating the nanostructure of Al-oxide with deposition conditions and dielectric contributions of two-level systems in perspective of superconducting quantum circuits},
  author = {S. Fritz and A. Seiler and L. Radtke and R. Schneider and M. Weides and G. Weiß and D. Gerthsen},
  year = {2017},
  doi = {10.1038/s41598-018-26066-4},
  url = {https://arxiv.org/abs/1712.01581},
  note = {Source identifier: 1712.01581}
}