TY - RPRT TI - Correlating the nanostructure of Al-oxide with deposition conditions and dielectric contributions of two-level systems in perspective of superconducting quantum circuits AU - S. Fritz AU - A. Seiler AU - L. Radtke AU - R. Schneider AU - M. Weides AU - G. Weiß AU - D. Gerthsen PY - 2017 DO - 10.1038/s41598-018-26066-4 UR - https://arxiv.org/abs/1712.01581 ID - 1712.01581 ER -