@misc{indiciaec09098da094b,
  title = {On-chip self-sensing enhancing actuation for MEMS/NEMS with large efficiency},
  author = {Meiyong Liao and Liwen Sang and Tokuyuki Teraji and Satoshi Koizumi and Yasuo Koide},
  year = {2018},
  url = {https://arxiv.org/abs/1712.02918},
  note = {Source identifier: 1712.02918}
}