TY  - RPRT
TI  - On-chip self-sensing enhancing actuation for MEMS/NEMS with large efficiency
AU  - Meiyong Liao
AU  - Liwen Sang
AU  - Tokuyuki Teraji
AU  - Satoshi Koizumi
AU  - Yasuo Koide
PY  - 2018
UR  - https://arxiv.org/abs/1712.02918
ID  - 1712.02918
ER  -