@misc{indiciae8c109e4c8ead,
  title = {Selective etching of PDMS: etching as a negative tone resist},
  author = {S. Z. Szilasi and L. Juhasz},
  year = {2017},
  doi = {10.1016/j.apsusc.2018.04.006},
  url = {https://arxiv.org/abs/1712.03119},
  note = {Source identifier: 1712.03119}
}