TY  - RPRT
TI  - Selective etching of PDMS: etching as a negative tone resist
AU  - S. Z. Szilasi
AU  - L. Juhasz
PY  - 2017
DO  - 10.1016/j.apsusc.2018.04.006
UR  - https://arxiv.org/abs/1712.03119
ID  - 1712.03119
ER  -