@misc{indiciae86fdc7edd002, title = {Finite Size Effects in Highly Scaled Ruthenium Interconnects}, author = {Shibesh Dutta and Kristof Moors and Michiel Vandemaele and Christoph Adelmann}, year = {2018}, doi = {10.1109/led.2017.2788889}, url = {https://arxiv.org/abs/1712.03859}, note = {Source identifier: 1712.03859} }