@misc{indiciaeaf172dcbf6f5, title = {Impacts of Doping on Epitaxial Germanium Thin Film Quality and Si-Ge Interdiffusion}, author = {Guangnan Zhou and Kwang Hong Lee and Dalaver H. Anjum and Qiang Zhang and Xixiang Zhang and Chuan Seng Tan and Guangrui and Xia}, year = {2017}, url = {https://arxiv.org/abs/1712.05468}, note = {Source identifier: 1712.05468} }