@misc{indiciae82bc193449af,
  title = {Ab Initio Study of the Early Stage of Si Epitaxy on the Chlorinated Si(100) Surface},
  author = {T. V. Pavlova and E. S. Skorokhodov and G. M. Zhidomirov and K. N. Eltsov},
  year = {2019},
  doi = {10.1021/acs.jpcc.9b06128},
  url = {https://arxiv.org/abs/1712.05499},
  note = {Source identifier: 1712.05499}
}