TY  - RPRT
TI  - Ab Initio Study of the Early Stage of Si Epitaxy on the Chlorinated Si(100) Surface
AU  - T. V. Pavlova
AU  - E. S. Skorokhodov
AU  - G. M. Zhidomirov
AU  - K. N. Eltsov
PY  - 2019
DO  - 10.1021/acs.jpcc.9b06128
UR  - https://arxiv.org/abs/1712.05499
ID  - 1712.05499
ER  -