@misc{indiciae17d6b2199394, title = {Thin film metrology and microwave loss characterization of indium and aluminum/indium superconducting planar resonators}, author = {C. R. H. McRae and J. H. Béjanin and C. T. Earnest and T. G. McConkey and J. R. Rinehart and C. Deimert and J. P. Thomas and Z. R. Wasilewski and M. Mariantoni}, year = {2017}, doi = {10.1063/1.5020514}, url = {https://arxiv.org/abs/1712.08706}, note = {Source identifier: 1712.08706} }