TY  - RPRT
TI  - Thin film metrology and microwave loss characterization of indium and aluminum/indium superconducting planar resonators
AU  - C. R. H. McRae
AU  - J. H. Béjanin
AU  - C. T. Earnest
AU  - T. G. McConkey
AU  - J. R. Rinehart
AU  - C. Deimert
AU  - J. P. Thomas
AU  - Z. R. Wasilewski
AU  - M. Mariantoni
PY  - 2017
DO  - 10.1063/1.5020514
UR  - https://arxiv.org/abs/1712.08706
ID  - 1712.08706
ER  -