@misc{indiciae7e0d2a3fc874,
  title = {Extreme-ultraviolet light source for lithography based on an expanding jet of dense xenon plasma supported by microwaves},
  author = {I. S. Abramov and E. D. Gospodchikov and A. G. Shalashov},
  year = {2018},
  doi = {10.1103/physrevapplied.10.034065},
  url = {https://arxiv.org/abs/1712.10026},
  note = {Source identifier: 1712.10026}
}