TY  - RPRT
TI  - Extreme-ultraviolet light source for lithography based on an expanding jet of dense xenon plasma supported by microwaves
AU  - I. S. Abramov
AU  - E. D. Gospodchikov
AU  - A. G. Shalashov
PY  - 2018
DO  - 10.1103/physrevapplied.10.034065
UR  - https://arxiv.org/abs/1712.10026
ID  - 1712.10026
ER  -