@misc{indiciaea05e5e0950d3,
  title = {Superconductor Electronics Fabrication Process with MoN\$\_x\$ Kinetic Inductors and Self-Shunted Josephson Junctions},
  author = {Sergey K. Tolpygo and Vladimir Bolkhovsky and D. E. Oates and R. Rastogi and S. Zarr and A. L. Day and T. J. Weir and Alex Wynn and L. M. Johnson},
  year = {2018},
  doi = {10.1109/tasc.2018.2809442},
  url = {https://arxiv.org/abs/1801.02659},
  note = {Source identifier: 1801.02659}
}