@misc{indiciae4482e39bbcb7,
  title = {Amplitude- and gas pressure-dependent nonlinear damping of high-Q oscillatory MEMS micro mirrors},
  author = {Ulrike Nabholz and Wolfgang Heinzelmann and Jan E. Mehner and Peter Degenfeld-Schonburg},
  year = {2018},
  doi = {10.1109/jmems.2018.2816240},
  url = {https://arxiv.org/abs/1801.04758},
  note = {Source identifier: 1801.04758}
}