TY  - RPRT
TI  - Amplitude- and gas pressure-dependent nonlinear damping of high-Q oscillatory MEMS micro mirrors
AU  - Ulrike Nabholz
AU  - Wolfgang Heinzelmann
AU  - Jan E. Mehner
AU  - Peter Degenfeld-Schonburg
PY  - 2018
DO  - 10.1109/jmems.2018.2816240
UR  - https://arxiv.org/abs/1801.04758
ID  - 1801.04758
ER  -