@misc{indiciaef3d939039683,
  title = {Highly selective dry etching of GaP in the presence of Al\$\_\textbackslash{}textrm\{x\}\$Ga\$\_\{1-\textbackslash{}textrm\{x\}\}\$P},
  author = {Simon Hönl and Herwig Hahn and Yannick Baumgartner and Lukas Czornomaz and Paul Seidler},
  year = {2018},
  doi = {10.1088/1361-6463/aab8b7},
  url = {https://arxiv.org/abs/1801.06469},
  note = {Source identifier: 1801.06469}
}