@misc{indiciae97880e48a5f4,
  title = {On performance of nano-resonators produced by magnetron sputtering deposition},
  author = {Mohamed Shaat},
  year = {2017},
  doi = {10.1016/j.physe.2018.07.019},
  url = {https://arxiv.org/abs/1801.06529},
  note = {Source identifier: 1801.06529}
}