TY  - RPRT
TI  - On performance of nano-resonators produced by magnetron sputtering deposition
AU  - Mohamed Shaat
PY  - 2017
DO  - 10.1016/j.physe.2018.07.019
UR  - https://arxiv.org/abs/1801.06529
ID  - 1801.06529
ER  -