@misc{indiciae69dc07f76e53, title = {Commercialization of micro-fabrication of antenna-coupled Transition Edge Sensor bolometer detectors for studies of the Cosmic Microwave Background}, author = {Aritoki Suzuki and Chris Bebek and Maurice Garcia-Sciveres and Stephen Holland and Akito Kusaka and Adrian T. Lee and Nicholas Palaio and Natalie Roe and Leo Steinmetz}, year = {2018}, doi = {10.1007/s10909-018-1903-6}, url = {https://arxiv.org/abs/1801.06991}, note = {Source identifier: 1801.06991} }