@misc{indiciaea26bbb828ee0,
  title = {A Review of Micromachined Thermal Accelerometers},
  author = {Rahul Mukherjee and Joydeep Basu and Pradip Mandal and Prasanta Kumar Guha},
  year = {2018},
  doi = {10.1088/1361-6439/aa964d},
  url = {https://arxiv.org/abs/1801.07297},
  note = {Source identifier: 1801.07297}
}