TY  - RPRT
TI  - Coefficient of Thermal Expansion Mismatch Induced Stress Calculation for Field Assisted Bonding of Silicon to Glass
AU  - Leonid S. Sinev
AU  - Vladimir T. Ryabov
PY  - 2017
UR  - https://arxiv.org/abs/1802.01490
ID  - 1802.01490
ER  -