@misc{indiciae5507d9bef869,
  title = {Synthesis of nanocrystalline d-MoN by thermal annealing of amorphous thin films grown on (100) Si by reactive DC sputtering at room temperature},
  author = {N. Haberkorn and S. Bengio and H. Troiani and S. Suárez and P. D. Pérez and M. Sirena and J. Guimpel},
  year = {2018},
  doi = {10.1016/j.tsf.2018.06.010},
  url = {https://arxiv.org/abs/1802.01964},
  note = {Source identifier: 1802.01964}
}