TY  - RPRT
TI  - Synthesis of nanocrystalline d-MoN by thermal annealing of amorphous thin films grown on (100) Si by reactive DC sputtering at room temperature
AU  - N. Haberkorn
AU  - S. Bengio
AU  - H. Troiani
AU  - S. Suárez
AU  - P. D. Pérez
AU  - M. Sirena
AU  - J. Guimpel
PY  - 2018
DO  - 10.1016/j.tsf.2018.06.010
UR  - https://arxiv.org/abs/1802.01964
ID  - 1802.01964
ER  -