TY  - RPRT
TI  - Mechanical Stresses Estimation in Silicon and Glass Bonded at Elevated Temperature
AU  - Leonid S. Sinev
PY  - 2018
DO  - 10.7463/1214.0745310
UR  - https://arxiv.org/abs/1802.02559
ID  - 1802.02559
ER  -