@misc{indiciaee34dc5910d6a, title = {A Compact Low-Cost Low-Maintenance Open Architecture Mask Aligner for Fabrication of Multilayer Microfluidics Devices}, author = {Quang Long Pham and Nhat-Anh N. Tong and Austin Mathew and Roman S. Voronov}, year = {2018}, doi = {10.1063/1.5035282}, url = {https://arxiv.org/abs/1802.07815}, note = {Source identifier: 1802.07815} }