TY  - RPRT
TI  - A Compact Low-Cost Low-Maintenance Open Architecture Mask Aligner for Fabrication of Multilayer Microfluidics Devices
AU  - Quang Long Pham
AU  - Nhat-Anh N. Tong
AU  - Austin Mathew
AU  - Roman S. Voronov
PY  - 2018
DO  - 10.1063/1.5035282
UR  - https://arxiv.org/abs/1802.07815
ID  - 1802.07815
ER  -