@misc{indiciae506c1c148be6,
  title = {Strain effect in highly-doped n-type 3C-SiC-on-glass substrate for mechanical sensors and mobility enhancement},
  author = {Hoan-Phuong Phan and Tuan-Khoa Nguyen and Toan Dinh and Han-Hao Cheng and Fengwen Mu and Alan Iacopi and Leonie Hold and Tadatomo Suga and Dzung Viet Dao and Debbie G. Senesky and Nam-Trung Nguyen},
  year = {2018},
  doi = {10.1002/pssa.201800288},
  url = {https://arxiv.org/abs/1802.07941},
  note = {Source identifier: 1802.07941}
}