TY  - RPRT
TI  - Strain effect in highly-doped n-type 3C-SiC-on-glass substrate for mechanical sensors and mobility enhancement
AU  - Hoan-Phuong Phan
AU  - Tuan-Khoa Nguyen
AU  - Toan Dinh
AU  - Han-Hao Cheng
AU  - Fengwen Mu
AU  - Alan Iacopi
AU  - Leonie Hold
AU  - Tadatomo Suga
AU  - Dzung Viet Dao
AU  - Debbie G. Senesky
AU  - Nam-Trung Nguyen
PY  - 2018
DO  - 10.1002/pssa.201800288
UR  - https://arxiv.org/abs/1802.07941
ID  - 1802.07941
ER  -