@misc{indiciaef1372d54b498,
  title = {Advanced Fabrication of Single-crystal Diamond Membranes for Quantum Technologies},
  author = {Michel Challier and Selda Sonusen and Arne Barfuss and Dominik Rohner and Daniel Riedel and Johannes Koelbl and Marc Ganzhorn and Patrick Appel and Patrick Maletinsky and Elke Neu},
  year = {2018},
  url = {https://arxiv.org/abs/1802.08971},
  note = {Source identifier: 1802.08971}
}