TY  - RPRT
TI  - Towards chemically neutral carbon cleaning processes: Plasma cleaning of Ni, Rh, and Al reflective optical coatings and thin Al filters for Free Electron Lasers and synchrotron beamline applications
AU  - H. Moreno Fernández
AU  - M. Zangrando
AU  - G. Sauthier
AU  - A. R. Goñi
AU  - V. Carlino
AU  - E. Pellegrin
PY  - 2018
UR  - https://arxiv.org/abs/1803.01675
ID  - 1803.01675
ER  -