@misc{indiciae0254318b7516,
  title = {Room temperature deposition of superconducting Niobium Nitride films by ion beam assisted sputtering},
  author = {Tomas Polakovic and Sergi Lendinez and John E. Pearson and Axel Hoffmann and Volodymyr Yefremenko and Clarence L. Chang and Whitney Armstrong and John Arrington and Kawtar Hafidi and Goran Karapetrov and Valentine Novosad},
  year = {2018},
  doi = {10.1063/1.5031904},
  url = {https://arxiv.org/abs/1803.02417},
  note = {Source identifier: 1803.02417}
}